Kinetic modeling of the NF₃ decomposition via dielectric barrier discharges in N₂/NF₃ mixtures

Emission of PFCs (perfluorocompound) has attracted mich attention in recent years due to its relatively high contribution to the global warming. Non-thermal plasma is one of the most promising technologies to effectively control the PFC emissions. In this study, a cylindrical DBD (dielectric barrier discharge) reactor is adopted for the treatment of NF₃-containing streams. Besides the experimental work, a numerical model is also developed for better understanding of the reaction mechanism of NF₃ abatement in N₂/NF₃ mixtures. Good agreement is observed between the experimental data and the simulation results. Simulation results indicate that the electrons and the N atoms are the major active s clos responsible for the NF₃ decomposition. In addition, N₂(A³∑_u⁺) metastables plays a significant role in the NF₃ abatement. A simplified mechanism for the NF₃ decomposition in the N₂ - NF₃ plasmas is proposed as well. A figure is presented. Reaction mechanisms for the decomposition of NF₃ in a N₂ - NF₃ plasma.