Investigation on the differential quadrature Fabry-Pérot interferometer with variable measurement mirrors

Yi Chieh Shih, Pi Cheng Tung, Wen Yuh Jywe, Chung Ping Chang, Lih Horng Shyu, Tung Hsien Hsieh

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry-Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry-Pérot interferometer. Although a polarized Fabry-Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry-Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry-Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry-Pérot interferometer is feasible for precise displacement measurement.

Original languageEnglish
Article number6191
JournalApplied Sciences (Switzerland)
Volume10
Issue number18
DOIs
StatePublished - Sep 2020

Keywords

  • Differential Fabry-Pérot interferometer
  • Homodyne interferometer
  • Linear displacement
  • Nonlinearity error

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