Investigation on displacement measurements in the large measuring range by utilizing multibeam interference

Lih Horng Shyu, Yung Cheng Wang, Chung Ping Chang, Pi Cheng Tung, Eberhard Manske

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


The laser interferometer has been implemented for the precision displacement measurement and calibration, due to its high resolution of the nanometer order and the large measuring range. Multibeam interferometry is often used for the micro-displacement, because of its common optical path structure being resistive to the environmental disturbances. The conventional multibeam interferometers like Fabry-Perot interferometers are composed by two approximately parallel planar mirrors. With this optical structure, the measuring range will be constrained in micrometers. In this investigation, a modified multibeam interferometer with corner-cube prism has been proposed to resolve the problem. With the new arrangement of the optical path, the displacement measurement will be insensitive to the tilt angle and the optical resolution will be better than that of the conventional multibeam interferometer with two planar mirrors. This will be beneficial to realize the high precision displacement in the large measuring range and under the uncomplicated measuring condition. The experimental results show that the standard deviation is about 0.255 μm in measuring range of 160 mm, if the tilt angle is less than ±9." That also proves that the proposed interferometer is feasible for precision displacement measurement in the large range.

Original languageEnglish
Pages (from-to)1109-1112
Number of pages4
JournalSensor Letters
Issue number5-6
StatePublished - May 2012


  • Common Optical Path
  • Interferometric Displacement Measurement
  • Multibeam Interference
  • Tilt Angle


Dive into the research topics of 'Investigation on displacement measurements in the large measuring range by utilizing multibeam interference'. Together they form a unique fingerprint.

Cite this