Investigation of thin TiO ₂ films cosputtered with Si species

Engineering & Materials Science

• Binding energy 61%
• Ion beams 18%
• Optical properties 48%
• Oxygen 62%
• Refractive index 33%
• Sputtering 16%
• Titanium 100%
• Titanium dioxide 16%
• X ray photoelectron spectroscopy 15%

Physics & Astronomy

• augmentation 7%
• binding energy 33%
• coefficients 14%
• extinction 21%
• ion beams 10%
• linkages 15%
• optical properties 25%
• oxygen 46%
• photoelectron spectroscopy 10%
• refractivity 18%
• sputtering 10%
• titanium 85%
• titanium oxides 13%
• trends 9%
• x rays 5%

Chemical Compounds

• Amount 5%
• Deposition Technique 14%
• Dioxygen 37%
• Ion Beam Sputtering 20%
• Liquid Film 50%
• Modification 14%
• Optical Property 28%
• Reduction 5%
• Refractive Index 24%
• Titanium Dioxide 10%
• X-Ray Photoelectron Spectroscopy 9%