Interferometry Based EUV Spectrometer

Yen Yin Li, Yin Wen Lee, Tuan Shu Ho, Rong Tz Wei, Po Yen Lai, Kao Sheng Jao, I. Chou Wu, Shih Hung Chen, Sheng Lung Huang

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener-Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.

Original languageEnglish
Article number7961150
JournalIEEE Photonics Journal
Issue number4
StatePublished - Aug 2017


  • EUV
  • X-ray applications
  • X-ray optics
  • X-ray spectroscopy


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