Interferometry Based EUV Spectrometer

Yen Yin Li; Yin Wen Lee; Tuan Shu Ho; Rong Tz Wei; Po Yen Lai; Kao Sheng Jao; I. Chou Wu; Shih Hung Chen; Sheng Lung Huang

doi:10.1109/JPHOT.2017.2720586

Interferometry Based EUV Spectrometer

Yen Yin Li, Yin Wen Lee, Tuan Shu Ho, Rong Tz Wei, Po Yen Lai, Kao Sheng Jao, I. Chou Wu, Shih Hung Chen, Sheng Lung Huang

Department of Physics

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener-Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.

Original language	English
Article number	7961150
Journal	IEEE Photonics Journal
Volume	9
Issue number	4
DOIs	https://doi.org/10.1109/JPHOT.2017.2720586
State	Published - Aug 2017

Keywords

EUV
X-ray applications
X-ray optics
X-ray spectroscopy

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10.1109/JPHOT.2017.2720586

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title = "Interferometry Based EUV Spectrometer",

abstract = "A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener-Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.",

keywords = "EUV, X-ray applications, X-ray optics, X-ray spectroscopy",

author = "Li, {Yen Yin} and Lee, {Yin Wen} and Ho, {Tuan Shu} and Wei, {Rong Tz} and Lai, {Po Yen} and Jao, {Kao Sheng} and Wu, {I. Chou} and Chen, {Shih Hung} and Huang, {Sheng Lung}",

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T1 - Interferometry Based EUV Spectrometer

AU - Li, Yen Yin

AU - Lee, Yin Wen

AU - Ho, Tuan Shu

AU - Wei, Rong Tz

AU - Lai, Po Yen

AU - Jao, Kao Sheng

AU - Wu, I. Chou

AU - Chen, Shih Hung

AU - Huang, Sheng Lung

PY - 2017/8

Y1 - 2017/8

N2 - A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener-Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.

AB - A compact and wavelength-calibration-free interferometric scheme was numerically and experimentally investigated using an extreme ultraviolet (EUV) source generated by a laser-produced plasma. A Michelson-type interferometer with a common path, formed by a Si/Mo-multilayer-based beam splitter and mirror, was utilized to achieve system compactness. Based on the Wiener-Khinchin theorem, an accurate EUV spectrum was obtained by numerically analyzing the measured signal autocorrelation without performing wavelength calibration. The achieved spectral resolution of 30 pm was comparable to those of flat-field spectrometers. Various high-oxidation states of Sn and the residual O in the vacuum chamber were also successfully identified.

KW - EUV

KW - X-ray applications

KW - X-ray optics

KW - X-ray spectroscopy

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DO - 10.1109/JPHOT.2017.2720586

M3 - 期刊論文

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VL - 9

JO - IEEE Photonics Journal

JF - IEEE Photonics Journal

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Interferometry Based EUV Spectrometer

Abstract

Keywords

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