Integration of plasma with catalyst for removing cf4 from gas streams

Ya Sheng Chen, Kuan Lun Pan, Amir Machmud, Moo Been Chang

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Removal of CF4 was evaluated with three systems including catalytic hydrolysis, plasma-alone, and plasma catalysis. CF4 conversion achieved with catalytic hydrolysis using γ-Al2O3 as catalyst reaches 80.1% when the operating parameters are controlled at T = 800 ℃, gas hour space velocity (GHSV) = 6000 hr−1, inlet CF4 = 300 ppm, and H2O(g) content = 10%, respectively. The main products of CF4 conversion via catalytic hydrolysis are CO2 and HF. On the other hand, plasma-alone system reveals 50% CF4 conversion at 12 kV (gas flow rate = 100 mL min−1, GHSV = 6000 hr−1, inlet CF4 = 300 ppm, and frequency = 18.5 kHz). For the plasma catalysis, good conversions of CF4 are obtained when γ-Al2O3 is applied as a catalyst. For instance, 100% conversion efficiency of CF4 can be achieved with the applied voltage of 12 kV. Moreover, the results indicate that plasma catalysis can remove more CF4 if compared with plasma-alone at the same level of energy consumption. When O2 is added into the system, the main products of CF4 conversion in plasma system include NO2, N2O, CO, CO2, and COF2. This study has confirmed that combined nonthermal plasma with appropriate catalyst is effective in converting CF4 and this system has good potential for further development.

Original languageEnglish
Article numbere03004
JournalInternational Journal of Plasma Environmental Science and Technology
StatePublished - 2021


  • Plasma alone
  • Plasma catalysis
  • Tetrafluoromethane (CF)
  • γ-AlO


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