Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter

Shih Jui Chen, Chuang Yuan Lee, Eun Sok Kim

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

This paper presents the design, fabrication, and characterization of a contactless radio frequency (RF) microelectromechanical system (MEMS) switch, composed of two surface-micromachined piezoelectric tunable capacitors and two bonded-wire inductors. The measured insertion loss and power isolation of the fabricated switch are 2.2 and 10.1 dB, respectively, with a capacitance variation of 4:1 over a narrow bandwidth near 2.2 GHz. This novel approach of using inductors eases the deflection requirement for the deformable bridge of the variable capacitor, and allows piezoelectric ZnO film to be used to deflect the capacitor bridge to vary the air gap, thus yielding a contactless RF switch.

Original languageEnglish
Pages (from-to)73-78
Number of pages6
JournalSensors and Actuators, A: Physical
Volume165
Issue number1
DOIs
StatePublished - Jan 2011

Keywords

  • Bonded-wire inductor
  • Contactless RF MEMS switch
  • Tunable capacitor
  • Tunable filter

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