Abstract
InAlGaAs/InGaAs quaternary high electron mobility transistors grown on InP substrates were fabricated and evaluated. The transistor performance was improved by adding Ga atoms into the InAlAs layers. The sidegating effect was also reduced. The device became more reliable by using the quaternary InAlGaAs as Schottky and buffer layers.
Original language | English |
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Pages (from-to) | 412-415 |
Number of pages | 4 |
Journal | Conference Proceedings - International Conference on Indium Phosphide and Related Materials |
State | Published - 1995 |
Event | Proceedings of the 7th International Conference on Indium Phosphide and Related Materials - Sapporo, Jpn Duration: 9 May 1995 → 13 May 1995 |