Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry

Ming Hung Chiu, Shinn Fwu Wang, Rong Seng Chang

Research output: Contribution to journalArticlepeer-review

57 Scopus citations

Abstract

A new instrument for measuring small angina by use of multiple total internal reflections in heterodyne interferometry is presented. With this instrument we can achieve a small rotation angle only by measuring the variation in phase difference between s- and p-polarization states. To improve its sensitivity we increase the number of total internal reflections by using two parallelogram prisms instead, of two right-angle prisms. The angular resolution of the new instrument is better than 2.2 × 10-6 rad over the measurement range -2.12° ≤ θ ≤ 2.12° for 20 total-internal reflections. The experimental results and the theoretical curve are in good agreement.

Original languageEnglish
Pages (from-to)5438-5442
Number of pages5
JournalApplied Optics
Volume43
Issue number29
DOIs
StatePublished - 10 Oct 2004

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