Infrared absorption efficiency enhancement of the CMOS compatible thermopile by the special subwavelength hole arrays

Yun Ying Yeh; Chih Hsiung Shen; Chi Feng Chen

doi:10.3390/APP10082966

Infrared absorption efficiency enhancement of the CMOS compatible thermopile by the special subwavelength hole arrays

Yun Ying Yeh, Chih Hsiung Shen, Chi Feng Chen

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxidesemiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

Original language	English
Article number	2966
Journal	Applied Sciences (Switzerland)
Volume	10
Issue number	8
DOIs	https://doi.org/10.3390/APP10082966
State	Published - 1 Apr 2020

Keywords

CMOS-MEMS
Infrared radiation
Infrared sensors
Subwavelength
Subwavelength hole arrays
Thermopile

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10.3390/APP10082966

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title = "Infrared absorption efficiency enhancement of the CMOS compatible thermopile by the special subwavelength hole arrays",

abstract = "The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxidesemiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.",

keywords = "CMOS-MEMS, Infrared radiation, Infrared sensors, Subwavelength, Subwavelength hole arrays, Thermopile",

author = "Yeh, {Yun Ying} and Shen, {Chih Hsiung} and Chen, {Chi Feng}",

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AU - Yeh, Yun Ying

AU - Shen, Chih Hsiung

AU - Chen, Chi Feng

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Y1 - 2020/4/1

N2 - The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxidesemiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

AB - The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxidesemiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

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Infrared absorption efficiency enhancement of the CMOS compatible thermopile by the special subwavelength hole arrays

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Keywords

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