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Influences of stress on the growth of Ti and Ni silicide thin films on (001)Si
L. J. Chen, S. L. Cheng, H. M. Luo, H. Y. Huang, Y. C. Peng, B. Y. Tsui, C. J. Tsai, S. S. Guo
Research output: Contribution to conference › Paper › peer-review
3
Scopus
citations