Influence of low temperature oxidation and nitrogen passivation on the MOS interface of C-face 4H-SiC
- Kung Yen Lee
- , Yu Hao Chang
- , Yan Hao Huang
- , Shuen De Wu
- , Cheng Yueh Chung
- , Chih Fang Huang
- , Tai Chou Lee
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations