In-situ monitoring of internal temperature, flow rate and pressure in the high-temperature proton exchange membrane fuel cell stack using flexible integrated micro sensor

During the chemical reaction process of high-temperature proton exchange membrane fuel cell (HT-PEMFC) stack, the non-uniformity of internal local temperature, flow rate and pressure would result in poor membrane durability, fuel distribution non-uniformity and adverse impact on the fuel cell stack performance and service life. This paper applies the micro-electro-mechanical systems (MEMS) technology to develop flexible integrated (temperature, flow rate and pressure) micro sensor resistant to the high-temperature electrochemical environment. Appropriate materials and processing parameters are selected to protect the integrated micro sensor from failure or damage in long term test. The internal local temperature, flow rate and pressure are monitored in real time. The proposed design has advantages of three sensing functions, compactness, acid corrosion resistance, good temperature tolerance, short response time, in-situ measurement and applicability to any position.