In-plane displacement measurement with subnanometer resolution for precision manufacture platform

C. C. Wu, C. C. Hsu, J. Y. Lee, H. Y. Chen, H. F. Weng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint

Dive into the research topics of 'In-plane displacement measurement with subnanometer resolution for precision manufacture platform'. Together they form a unique fingerprint.

Keyphrases

Engineering