In-plane displacement measurement with subnanometer resolution for precision manufacture platform

C. C. Wu; C. C. Hsu; J. Y. Lee; H. Y. Chen; H. F. Weng

doi:10.1007/978-1-84628-988-0_57

In-plane displacement measurement with subnanometer resolution for precision manufacture platform

C. C. Wu, C. C. Hsu, J. Y. Lee, H. Y. Chen, H. F. Weng

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A novel method is presented for two-dimensional (2-D) in-plane displacement measurement that is based on the heterodyne interferometry. The method can effectively reduce the the environmental disturbance and allow the measurement of high stability and low uncertainty. According to the experiment results, the subnanometer resolution can be ensured within 250 μm measuring range. The in-plane displacement measurement is also accomplished.

Original language	English
Title of host publication	Proceedings of the 35th International MATADOR 2007 Conference
Publisher	Springer Science and Business Media, LLC
Pages	253-256
Number of pages	4
ISBN (Print)	9781846289873
DOIs	https://doi.org/10.1007/978-1-84628-988-0_57
State	Published - 2007
Event	35th International MATADOR 2007 Conference - Taipei, Taiwan Duration: 1 Jul 2007 → 1 Jul 2007

Publication series

Name	Proceedings of the 35th International MATADOR 2007 Conference

Conference

Conference	35th International MATADOR 2007 Conference
Country/Territory	Taiwan
City	Taipei
Period	1/07/07 → 1/07/07

Keywords

Grating
Heterodyne
In-plane
Subnanometer

Access to Document

10.1007/978-1-84628-988-0_57

Cite this

Wu, C. C., Hsu, C. C., Lee, J. Y., Chen, H. Y., & Weng, H. F. (2007). In-plane displacement measurement with subnanometer resolution for precision manufacture platform. In Proceedings of the 35th International MATADOR 2007 Conference (pp. 253-256). (Proceedings of the 35th International MATADOR 2007 Conference). Springer Science and Business Media, LLC. https://doi.org/10.1007/978-1-84628-988-0_57

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title = "In-plane displacement measurement with subnanometer resolution for precision manufacture platform",

abstract = "A novel method is presented for two-dimensional (2-D) in-plane displacement measurement that is based on the heterodyne interferometry. The method can effectively reduce the the environmental disturbance and allow the measurement of high stability and low uncertainty. According to the experiment results, the subnanometer resolution can be ensured within 250 μm measuring range. The in-plane displacement measurement is also accomplished.",

keywords = "Grating, Heterodyne, In-plane, Subnanometer",

author = "Wu, {C. C.} and Hsu, {C. C.} and Lee, {J. Y.} and Chen, {H. Y.} and Weng, {H. F.}",

year = "2007",

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isbn = "9781846289873",

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publisher = "Springer Science and Business Media, LLC",

pages = "253--256",

booktitle = "Proceedings of the 35th International MATADOR 2007 Conference",

note = "35th International MATADOR 2007 Conference ; Conference date: 01-07-2007 Through 01-07-2007",

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Wu, CC, Hsu, CC, Lee, JY, Chen, HY & Weng, HF 2007, In-plane displacement measurement with subnanometer resolution for precision manufacture platform. in Proceedings of the 35th International MATADOR 2007 Conference. Proceedings of the 35th International MATADOR 2007 Conference, Springer Science and Business Media, LLC, pp. 253-256, 35th International MATADOR 2007 Conference, Taipei, Taiwan, 1/07/07. https://doi.org/10.1007/978-1-84628-988-0_57

In-plane displacement measurement with subnanometer resolution for precision manufacture platform. / Wu, C. C.; Hsu, C. C.; Lee, J. Y. et al.
Proceedings of the 35th International MATADOR 2007 Conference. Springer Science and Business Media, LLC, 2007. p. 253-256 (Proceedings of the 35th International MATADOR 2007 Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - In-plane displacement measurement with subnanometer resolution for precision manufacture platform

AU - Wu, C. C.

AU - Hsu, C. C.

AU - Lee, J. Y.

AU - Chen, H. Y.

AU - Weng, H. F.

PY - 2007

Y1 - 2007

N2 - A novel method is presented for two-dimensional (2-D) in-plane displacement measurement that is based on the heterodyne interferometry. The method can effectively reduce the the environmental disturbance and allow the measurement of high stability and low uncertainty. According to the experiment results, the subnanometer resolution can be ensured within 250 μm measuring range. The in-plane displacement measurement is also accomplished.

AB - A novel method is presented for two-dimensional (2-D) in-plane displacement measurement that is based on the heterodyne interferometry. The method can effectively reduce the the environmental disturbance and allow the measurement of high stability and low uncertainty. According to the experiment results, the subnanometer resolution can be ensured within 250 μm measuring range. The in-plane displacement measurement is also accomplished.

KW - Grating

KW - Heterodyne

KW - In-plane

KW - Subnanometer

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DO - 10.1007/978-1-84628-988-0_57

M3 - 會議論文篇章

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SN - 9781846289873

T3 - Proceedings of the 35th International MATADOR 2007 Conference

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BT - Proceedings of the 35th International MATADOR 2007 Conference

PB - Springer Science and Business Media, LLC

T2 - 35th International MATADOR 2007 Conference

Y2 - 1 July 2007 through 1 July 2007

ER -

In-plane displacement measurement with subnanometer resolution for precision manufacture platform

Abstract

Publication series

Conference

Keywords

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