Improving the gas barrier property of SiOx:C thin films deposited by RF magnetron sputtering

Chien Cheng Kuo, Meng Chi Li, Shih Fang Liao, Chin Lun Wei, Hung Sen Wei, Cheng Chung Lee

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

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Engineering & Materials Science

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Chemical Compounds