Improvement on the surface roughness of micro lens array in the excimer laser machining process

Shuh Yi Wang, Chi Sheng Huang, Hsau Yu Chou, Tone Yen Lee, Rang Seng Chang

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations


A new process that improves the surface roughness of micro lens array after the excimer laser machining is studied. The results show that the smoother surface has been fabricated by this innovatory method. The excimer laser with mask projection machining has been successfully applied for the fabrication of 2.5D micro parts. Furthermore, the workpiece dragging machining is capable of manufacturing microstructure array with curved surface by using various shape of mask. But during the machining process, the laser is cutting shoot by shoot and the material is gradually removed layer by layer. The laser marks on the curved surface of micro lens array is obvious and inevitable. This defect limits the product of dragging in real optical application. To overcome this drawback, an improved process is studied. When the desired shape of lens array was machined by the excimer laser machining, the attaching photo resist with the thickness of several micro meter is coated on the rough surface by spin coating or spraying. Then the lens array is baked to get the mirror surface. This original method combines the advantage of the higher fill factor and the smoother surface for the fabrication of micro lens army.

Original languageEnglish
Pages (from-to)131-138
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2001
EventMOEMS and Miniaturized Systems II - San Francisco, CA, United States
Duration: 22 Oct 200124 Oct 2001


  • Excimer Laser Machining
  • Micro Lens Array
  • Mirror Surface


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