Improvement of the optical coating process by cutting layers with sensitive monitor wavelengths

Cheng Chung Lee, Kai Wu, Chien Cheng Kuo, Sheng Hui Chen

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

For costly optical coatings, a precise monitoring method is necessary. A new monitoring method based on the selection of the most sensitive monitor wavelength is proposed. The most sensitive monitor wavelength is easy to find by a numerical analysis. The equation for the thickness compensation when a layer is over-shot or under-shot was derived. Several examples, including narrow-band pass filters, have been given to demonstrate that this new method is superior to the turning point method in the coating process.

Original languageEnglish
Pages (from-to)4854-4861
Number of pages8
JournalOptics Express
Volume13
Issue number13
DOIs
StatePublished - 27 Jun 2005

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