Abstract
The performance of InGaAs/InAlAs single photon avalanche diodes (SPAD) was improved with fabrication in triple mesa. Current SPADs achieve better dark count rate of 5 × 104 Hz/μm2 for single photon detection efficiency of 31% at RT.
Original language | English |
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Article number | STu1B.4 |
Journal | Optics InfoBase Conference Papers |
State | Published - 2021 |
Event | Optical Sensors, Sensors 2021 - Part of OSA Optical Sensors and Sensing Congress 2021 - Virtual, Online, United States Duration: 19 Jul 2021 → 23 Jul 2021 |