Improved performance of InGaAs/InAlAs single photon avalanche diode with dual multiplication layers

Ping Li Wu, Yan Min Liao, Chi En Chen, Yu Jie Teng, Yu Ying Hung, Jin Wei Shi, Yi Shan Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The performance of InGaAs/InAlAs single photon avalanche diodes (SPAD) was improved with fabrication in triple mesa. Current SPADs achieve better dark count rate of 5 × 104 Hz/μm2 for single photon detection efficiency of 31% at RT.

Original languageEnglish
Title of host publicationOptical Sensors, Sensors 2021
PublisherThe Optical Society
ISBN (Electronic)9781557528209
StatePublished - 2021
EventOptical Sensors, Sensors 2021 - Part of OSA Optical Sensors and Sensing Congress 2021 - Virtual, Online, United States
Duration: 19 Jul 202123 Jul 2021

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceOptical Sensors, Sensors 2021 - Part of OSA Optical Sensors and Sensing Congress 2021
Country/TerritoryUnited States
CityVirtual, Online
Period19/07/2123/07/21

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