Implementation of a wafer positioning system

Yi Cheng Chen, Yun Yen Lee, Ju Yi Lee, Jian You Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This study implements a system for determining the precise location of a moving wafer in a process chamber. An array of optical sensors positioned along an axis transverse to the path of a moving wafer is employed in this wafer positioning system. A computer program for wafer center calculation is developed based on the time dependent signals from the optical sensing module. The developed computer program has a human machine interface, and estimates the center position as well as the moving direction of the wafer.

Original languageEnglish
Title of host publicationSICE 2011 - SICE Annual Conference 2011, Final Program and Abstracts
PublisherSociety of Instrument and Control Engineers (SICE)
Pages1938-1943
Number of pages6
ISBN (Print)9784907764395
StatePublished - 2011
Event50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011 - Tokyo, Japan
Duration: 13 Sep 201118 Sep 2011

Publication series

NameProceedings of the SICE Annual Conference

Conference

Conference50th Annual Conference on Society of Instrument and Control Engineers, SICE 2011
Country/TerritoryJapan
CityTokyo
Period13/09/1118/09/11

Keywords

  • Beam-breaking
  • Human Machine Interface
  • Wafer Positioning

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