Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis
Wei Yu Zhou, Hsuan Fan Chen, Xue Li Tseng, Hsiao Han Lo, Peter J. Wang, Ming Yu Jiang, Yiin Kuen Fuh, Tomi T. Li
Research output: Contribution to journal › Article › peer-review
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