Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang; Der Chin Chen

doi:10.1117/12.134871.full

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang
, Der Chin Chen

Department of Optics and Photonics

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

Original language	English
Pages (from-to)	276-282
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1531
DOIs	https://doi.org/10.1117/12.134871.full
State	Published - 1 Jan 1992
Event	Advanced Optical Manufacturing and Testing II 1991 - San Diego, United States Duration: 21 Jul 1991 → …

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title = "Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping",

abstract = "In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.",

author = "Chang, \{Rong Seng\} and Chen, \{Der Chin\}",

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AU - Chen, Der Chin

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N2 - In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

AB - In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

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U2 - 10.1117/12.134871.full

DO - 10.1117/12.134871.full

M3 - 會議論文

AN - SCOPUS:85075521444

SN - 0277-786X

VL - 1531

SP - 276

EP - 282

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Advanced Optical Manufacturing and Testing II 1991

Y2 - 22 April 2003

ER -

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

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