Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang; Der Chin Chen

doi:10.1117/12.134871.full

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

Rong Seng Chang, Der Chin Chen

Department of Optics and Photonics

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

Original language	English
Pages (from-to)	276-282
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1531
DOIs	https://doi.org/10.1117/12.134871.full
State	Published - 1 Jan 1992
Event	Advanced Optical Manufacturing and Testing II 1991 - San Diego, United States Duration: 21 Jul 1991 → …

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title = "Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping",

abstract = "In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.",

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N2 - In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.

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M3 - 會議論文

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JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Advanced Optical Manufacturing and Testing II 1991

Y2 - 21 July 1991

ER -

Hight degree of accuracy in flatness and parallelism of thin sapphire ring manufacture with double sided lapping

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