In this paper, We design a new double-sided lapping method which can accurately and efficiently lap extrmely hard sapphire plates. We use chemo-mechanical polishing method for final polishing to get scratch-free surface.
|Number of pages||7|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|State||Published - 1 Jan 1992|
|Event||Advanced Optical Manufacturing and Testing II 1991 - San Diego, United States|
Duration: 21 Jul 1991 → …