@inproceedings{780e12891d24436c91760fb35a598221,
title = "High-Q Silicon Nitride Waveguide Resonators by Nanoimprint Lithography",
abstract = "We demonstrate the fabrication of waveguide resonators using nanoimprint technology. Silicon nitride resonators are realized by nanoimprinting lithography (NIL) with high-quality (Q) factors up to the order of 105. Nearly-zero waveguide dispersion can be achieved with 30 dB extinction ratios of cavity resonances.",
keywords = "nanoimprint, silicon photonics, waveguide dispersion, waveguide resonator",
author = "Wang, {Pei Hsun} and Zheng, {He Yuan} and Liu, {Yuan Hsiu} and Wang, {Chih Ming}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE Silicon Photonics Conference, SiPhotonics 2024 ; Conference date: 15-04-2024 Through 18-04-2024",
year = "2024",
doi = "10.1109/SiPhotonics60897.2024.10543536",
language = "???core.languages.en_GB???",
series = "IEEE International Conference on Group IV Photonics GFP",
publisher = "IEEE Computer Society",
booktitle = "2024 IEEE Silicon Photonics Conference, SiPhotonics 2024 - Proceedings",
}