High-Performance Large-Area InGaAs MSM Photodetectors with a Pseudomorphic InGaP Cap Layer

Rong Heng Yuang, Hung Chang Shieh, Yi Jiunn Chien, Yi Jen Chan, Jen Inn Chyi, Wei Lin, Yuan Kuang Tu

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

We report the fabrication and characteristics of high-performance InGaAs MSM photodetectors with a 300-µm × 300-µm square and a 300-µm-diameter circular detection area. With a pseudomorphic In0.9Ga0.1P cap layer, the detectors exhibit dark current densities less than 1 pA/µm2. The responsivity ranges between 0.4 and 0.6 A/W depending on finger spacing. Bandwidth over 1 GHz has been obtained for these large-area detectors. Our results also show that the circular detector exhibits better speed performance as compared to the square one due to its smaller parasitic RC constant.

Original languageEnglish
Pages (from-to)914-916
Number of pages3
JournalIEEE Photonics Technology Letters
Volume7
Issue number8
DOIs
StatePublished - 1995

Fingerprint

Dive into the research topics of 'High-Performance Large-Area InGaAs MSM Photodetectors with a Pseudomorphic InGaP Cap Layer'. Together they form a unique fingerprint.

Cite this