High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation

Chun Lin Chang, Yen Yin Li, Po Yen Lai, Yi Ping Lai, Chien Wei Huang, Shih Hung Chen, Sheng Lung Huang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


High-efficiency fiber-based extreme ultraviolet driver in the alignment-free configuration has been experimentally achieved with a maximum intensity of 6.4×1010 W/cm2 on target at a repetition rate of 20 kHz. The output EUV signal within 10∼20 nm in wavelength was confirmed with a Si/Zr-coated x-ray photodiode by varying numbers of Be and Al foil filters. The measured spectral range is consistent with that obtained by the weighted oscillator strengths of Sn8+ to Sn+13 ions using an one-dimensional hydrodynamic code coupled with the ionization model of collisional-radiative equilibrium. The driver is based on a 1064-nm nanosecond coiled ytterbium all-fiber laser system in diode-seeded master oscillator power amplification. With an overall optical efficiency up to 56%, it can deliver a 1.16-mJ, 117-kW, 6.1-ns laser pulses with a FWHM linewidth of 10 nm and beam propagation factor of M2∼1.55. The full advantages of using fiber laser for a movable LPP EUV metrology source are revealed.

Original languageEnglish
Title of host publicationFiber Lasers XII
Subtitle of host publicationTechnology, Systems, and Applications
EditorsJohn Ballato, L. Brandon Shaw
ISBN (Electronic)9781628414349
StatePublished - 2015
EventFiber Lasers XII: Technology, Systems, and Applications - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceFiber Lasers XII: Technology, Systems, and Applications
Country/TerritoryUnited States
CitySan Francisco


  • Extreme ultraviolet
  • Fiber lasers and amplifiers
  • Hydrodynamic simulation
  • Laser-producedplasma
  • Master oscillator power amplifier
  • Ytterbium


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