@inproceedings{f0c63787bab74d449dd671e7dbef0656,
title = "High-intensity nanosecond all-fiber-coiled laser and extreme ultraviolet generation",
abstract = "High-efficiency fiber-based extreme ultraviolet driver in the alignment-free configuration has been experimentally achieved with a maximum intensity of 6.4×1010 W/cm2 on target at a repetition rate of 20 kHz. The output EUV signal within 10∼20 nm in wavelength was confirmed with a Si/Zr-coated x-ray photodiode by varying numbers of Be and Al foil filters. The measured spectral range is consistent with that obtained by the weighted oscillator strengths of Sn8+ to Sn+13 ions using an one-dimensional hydrodynamic code coupled with the ionization model of collisional-radiative equilibrium. The driver is based on a 1064-nm nanosecond coiled ytterbium all-fiber laser system in diode-seeded master oscillator power amplification. With an overall optical efficiency up to 56%, it can deliver a 1.16-mJ, 117-kW, 6.1-ns laser pulses with a FWHM linewidth of 10 nm and beam propagation factor of M2∼1.55. The full advantages of using fiber laser for a movable LPP EUV metrology source are revealed.",
keywords = "Extreme ultraviolet, Fiber lasers and amplifiers, Hydrodynamic simulation, Laser-producedplasma, Master oscillator power amplifier, Ytterbium",
author = "Chang, {Chun Lin} and Li, {Yen Yin} and Lai, {Po Yen} and Lai, {Yi Ping} and Huang, {Chien Wei} and Chen, {Shih Hung} and Huang, {Sheng Lung}",
note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Fiber Lasers XII: Technology, Systems, and Applications ; Conference date: 09-02-2015 Through 12-02-2015",
year = "2015",
doi = "10.1117/12.2075546",
language = "???core.languages.en_GB???",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "John Ballato and Shaw, {L. Brandon}",
booktitle = "Fiber Lasers XII",
}