High fidelity loud microspeaker based on PZT bimorph diaphragm

Youngki Choe, Shih Jui Chen, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

This paper describes a microspeaker (composed of a 8 × 8 mm 2 square mechanically-polished PZT bimorph diaphragm and bulk-micromachined silicon top cover) that shows flat diaphragm displacement from DC to 11 kHz. The microspeaker with an encapsulating cylindrical package of about 0.7 cc inside volume produces sound pressure level (SPL) of 118 ~ 125 dB between 1 and 10 kHz when measured 5 mm away from the diaphragm with 190V pcak-to-pcak sinusoidal input. The maximum displacement at the center of the diaphragm was measured to be 7.25 μm at the fundamental resonance frequency of 14.3 kHz, and the corresponding sound pressure level (SPL) was measured to be 133 dB.

Original languageEnglish
Title of host publicationNanotechnology 2010
Subtitle of host publicationElectronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages316-319
Number of pages4
StatePublished - 2010
EventNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
Duration: 21 Jun 201024 Jun 2010

Publication series

NameNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Volume2

Conference

ConferenceNanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Country/TerritoryUnited States
CityAnaheim, CA
Period21/06/1024/06/10

Keywords

  • Bimorph
  • Diaphragm
  • High fidelity
  • Loud microspeaker
  • PZT

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