@inproceedings{06599be8a11341fe963b0101abd020aa,
title = "Heterodyne interferometer for measurement of in-plane displacement with sub-nanometer resolution",
abstract = "A novel method of the measurement of in-plane displacement is presented. This method includes a heterodyne light source, a moving grating and a lock-in amplifier for phase measurement. The phase variation which resulted from the grating movement is measured by an optical heterodyne interferometer. The short and long displacement can be measured by our method. The theoretical resolution is about 1 pm. If considering the high frequency noise, the measurement error or resolution is about 0.2 nm yet.",
keywords = "Grating, Heterodyne interferometry, In-plane",
author = "Lee, {Ju Yi} and Chen, {Hui Yi} and Hsu, {Cheng Chih} and Wu, {Chyan Chyi}",
year = "2006",
doi = "10.1117/12.716145",
language = "???core.languages.en_GB???",
isbn = "0819463515",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Third International Symposium on Precision Mechanical Measurements",
note = "Third International Symposium on Precision Mechanical Measurements ; Conference date: 02-08-2006 Through 06-08-2006",
}