Heterodyne common-path grating interferometer with Littrow configuration

Chyan Chyi Wu, Cheng Chih Hsu, Ju Yi Lee, Yan Zou Chen

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

This paper presents a heterodyne common-path grating interferometer with Littrow configuration (HCGIL). The HCGIL can effectively overcome environmental disturbance effect and the DC offset and the amplitude variation of the measurement signals. Experimental results match well with the HP5529A results for long-range measurements. Results also show that the estimated measurement resolution is 0.15 ± 0.027 nm. The stability of the HCGIL is -0.41 ± 0.23 nm. Therefore, the HCGIL has potential for subnanometer resolution and long-range applications.

Original languageEnglish
Pages (from-to)13322-13332
Number of pages11
JournalOptics Express
Volume21
Issue number11
DOIs
StatePublished - 3 Jun 2013

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