Growth of hydrogenated microcrystalline silicon thin films using electron cyclotron resonance chemical deposition method

Teng Hsiang Chang, Yen Ho Chu, Chien Chieh Lee, Jenq Yang Chang, Tomi T. Li, I. Chen Chen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Keyphrases

Engineering

Material Science

Chemical Engineering