Growth of bent carbon nanotubes by in-situ control of cantilever bending

I. Chen Chen, Ping Jung Wu, Pei Yi Lin, Yu Cian Wang, Yen Hsun Chen

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A new and simple method for in-situ control of the growth direction of carbon nanotubes (CNTs) on cantilevers has been developed using plasma enhanced chemical vapor deposition (PECVD). Plasma-induced surface stresses in PECVD processes tend to cause bending of the cantilevers, which significantly changes the electric field distribution near the free-end of the cantilever. By adjusting the flow ratio of the feed gases during CNT growth, the degree of cantilever bending can be controlled due to the change in the plasma-induced surface stress, and in doing so manipulating the field line direction, as well as the growth direction of CNTs. Combining this in-situ tunable CNT growth technique with electron beam induced deposition of catalyst patterns, we have fabricated a bent CNT on a cantilever in one single, continuous deposition run.

Original languageEnglish
Pages (from-to)2760-2765
Number of pages6
Issue number8
StatePublished - Jul 2011


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