Gratings in GaN membranes

Chii Chang Chen, Chia Hung Hou, Jinn Kong Sheu, Jenq Yang Chang, L. I. Ming-Hung, Gou Chung Chi, Chuck Wu

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


In this work, gratings are fabricated on the GaN thin film grown on the silicon substrates. GaN membranes are obtained by removing the silicon below the GaN gratings. The samples are stacked on the GaN diffractive microlenses on sapphire substrates fabricated using gray-level masks. The stacked components are characterized using a He-Ne laser. The laser beam is collimated by the GaN microlenses and diffracted by the GaN gratings. The result demonstrates a stacked microoptics systems in GaN-based materials for the first tune.

Original languageEnglish
Pages (from-to)5854-5856
Number of pages3
JournalJapanese Journal of Applied Physics
Issue number8 B
StatePublished - Aug 2004


  • GaN
  • Gratings
  • Membranes
  • Microlenses
  • Microoptics


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