GaN diffractive microlenses for UV micro-optics system

C. C. Hou; M. H. Li; C. C. Chen; J. K. Sheu; J. Y. Chang; G. C. Chi; Chuck Wu; W. T. Cheng; J. H. Yeh

doi:10.1109/CLEOPR.2003.1277255

GaN diffractive microlenses for UV micro-optics system

C. C. Hou, M. H. Li, C. C. Chen, J. K. Sheu, J. Y. Chang, G. C. Chi, Chuck Wu, W. T. Cheng, J. H. Yeh

Department of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 10².

Original language	English
Title of host publication	CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
Subtitle of host publication	Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	715
Number of pages	1
ISBN (Electronic)	0780377664
DOIs	https://doi.org/10.1109/CLEOPR.2003.1277255
State	Published - 2003
Event	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan Duration: 15 Dec 2003 → 19 Dec 2003

Publication series

Name	Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
Volume	2

Conference

Conference	5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
Country/Territory	Taiwan
City	Taipei
Period	15/12/03 → 19/12/03

Access to Document

10.1109/CLEOPR.2003.1277255

Cite this

Hou, C. C., Li, M. H., Chen, C. C., Sheu, J. K., Chang, J. Y., Chi, G. C., Wu, C., Cheng, W. T., & Yeh, J. H. (2003). GaN diffractive microlenses for UV micro-optics system. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings (pp. 715). Article 1277255 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2003.1277255

Hou, C. C. ; Li, M. H. ; Chen, C. C. et al. / GaN diffractive microlenses for UV micro-optics system. CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 715 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

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title = "GaN diffractive microlenses for UV micro-optics system",

abstract = "In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.",

author = "Hou, {C. C.} and Li, {M. H.} and Chen, {C. C.} and Sheu, {J. K.} and Chang, {J. Y.} and Chi, {G. C.} and Chuck Wu and Cheng, {W. T.} and Yeh, {J. H.}",

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series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",

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Hou, CC, Li, MH, Chen, CC, Sheu, JK, Chang, JY, Chi, GC, Wu, C, Cheng, WT & Yeh, JH 2003, GaN diffractive microlenses for UV micro-optics system. in CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings., 1277255, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 715, 5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003, Taipei, Taiwan, 15/12/03. https://doi.org/10.1109/CLEOPR.2003.1277255

GaN diffractive microlenses for UV micro-optics system. / Hou, C. C.; Li, M. H.; Chen, C. C. et al.
CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc., 2003. p. 715 1277255 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - GaN diffractive microlenses for UV micro-optics system

AU - Hou, C. C.

AU - Li, M. H.

AU - Chen, C. C.

AU - Sheu, J. K.

AU - Chang, J. Y.

AU - Chi, G. C.

AU - Wu, Chuck

AU - Cheng, W. T.

AU - Yeh, J. H.

PY - 2003

Y1 - 2003

N2 - In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.

AB - In this work, diffractive microlenses were fabricated in GaN-based material by using gravy-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN anti-reflection thin films in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can be potentially used in the UV micro-optics system such as solar-blind detection applications. In the design example of this work, the structure may enhance the ultraviolet/visible rejection to be 102.

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Hou CC, Li MH, Chen CC, Sheu JK, Chang JY, Chi GC et al. GaN diffractive microlenses for UV micro-optics system. In CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics: Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings. Institute of Electrical and Electronics Engineers Inc. 2003. p. 715. 1277255. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). doi: 10.1109/CLEOPR.2003.1277255

GaN diffractive microlenses for UV micro-optics system

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