GaN diffractive microlenses fabricated with gray-level mask

Chii Chang Chen, Ming Hung Li, Chih Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Wei Tai Cheng, Jui Hung Yeh, Jenq Yang Chang, Toshiaki Ito

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


Plano-convex diffractive microlenses were fabricated in GaN-based materials with a gray-level mask for the first time. The surface relief of the gray-level diffractive microlens on photoresist was transferred onto GaN by inductively coupled plasma etching technique. The microlenses were characterized with a blue laser diode emitting at 405 nm. The focal length of the GaN diffractive microlens is 14.5 cm. The GaN microlenses can be used for the applications of the micro-optics systems in blue-violet-UV regions such as high-density optical data storage. The potential of the realization of the high-numerical-aperture diffractive microlens in GaN with gray-level mask is discussed.

Original languageEnglish
Pages (from-to)75-78
Number of pages4
JournalOptics Communications
Issue number1-3
StatePublished - 1 Jan 2002


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