@inproceedings{1f59b86eacc742eb8514d1d532d55d95,
title = "GaN Diffractive microlens fabricated with gray-level mask",
abstract = "We present the design and the fabrication of the GaN diffractive mcirolens by gray-level mask and inductively coupled plasma etching. The microlens was designed for the application of high-density optical data storage. The calculation results show that the high-numerical-aperture GaN diffractive microlens could be achieved by using the gray-level mask. The fabrication of the GaN diffractive microlens has been demonstrated for the first time. The advantage of using GaN as the material of the diffractive microlens is discussed.",
author = "Chen, {Chii Chang} and Li, {Ming Hung} and Chang, {Chih Yang} and Chi, {Gou Chung} and Chang, {Jenq Yang} and Cheng, {Wei Tai} and Yeh, {Jui Hung} and Chuck Wu",
note = "Publisher Copyright: {\textcopyright} 2002 OSA/DOMO 2002, {\textcopyright} 2000 Optical Society of America.; Diffractive Optics and Micro-Optics, DOMO 2002 ; Conference date: 03-06-2002 Through 06-06-2002",
year = "2002",
language = "???core.languages.en_GB???",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Diffractive Optics and Micro-Optics, DOMO 2002",
}