Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou; Ming Hung Li; Chii Chang Chen; Jenq Yang Chang; Jinn Kong Sheu; Gou Chung Chi; Chuck Wu; Wei Tai Cheng; Jui Hung Yeh

doi:10.1007/s10043-003-0287-1

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou, Ming Hung Li, Chii Chang Chen, Jenq Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Chuck Wu, Wei Tai Cheng, Jui Hung Yeh

Department of Optics and Photonics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 10².

Original language	English
Pages (from-to)	287-289
Number of pages	3
Journal	Optical Review
Volume	10
Issue number	4
DOIs	https://doi.org/10.1007/s10043-003-0287-1
State	Published - 2003

Keywords

AlN
Band-pass filter
Diffractive microlens
GaN
Gray-level mask
Solar-blind

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10.1007/s10043-003-0287-1

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title = "Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System",

abstract = "In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.",

keywords = "AlN, Band-pass filter, Diffractive microlens, GaN, Gray-level mask, Solar-blind",

author = "Hou, {Chia Hung} and Li, {Ming Hung} and Chen, {Chii Chang} and Chang, {Jenq Yang} and Sheu, {Jinn Kong} and Chi, {Gou Chung} and Chuck Wu and Cheng, {Wei Tai} and Yeh, {Jui Hung}",

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T1 - Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

AU - Hou, Chia Hung

AU - Li, Ming Hung

AU - Chen, Chii Chang

AU - Chang, Jenq Yang

AU - Sheu, Jinn Kong

AU - Chi, Gou Chung

AU - Wu, Chuck

AU - Cheng, Wei Tai

AU - Yeh, Jui Hung

PY - 2003

Y1 - 2003

N2 - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

AB - In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

KW - AlN

KW - Band-pass filter

KW - Diffractive microlens

KW - GaN

KW - Gray-level mask

KW - Solar-blind

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DO - 10.1007/s10043-003-0287-1

M3 - 期刊論文

AN - SCOPUS:0242408309

SN - 1340-6000

VL - 10

SP - 287

EP - 289

JO - Optical Review

JF - Optical Review

IS - 4

ER -

Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

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Keywords

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