Gallium Nitride Diffractive Microlenses Using in Ultraviolet Micro-Optics System

Chia Hung Hou, Ming Hung Li, Chii Chang Chen, Jenq Yang Chang, Jinn Kong Sheu, Gou Chung Chi, Chuck Wu, Wei Tai Cheng, Jui Hung Yeh

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


In this work, diffractive microlenses were fabricated in GaN using a gray-level mask and inductively coupled plasma etching technique. We also propose to insert the GaN/AlN band- pass filter in the microlenses to enhance the ultraviolet/visible rejection ratio. Due to high transparency of GaN and AlN in UV, the microlenses can potentially be used in a UV micro-optics system such as for solar-blind detection. In the design example of this work, the structure may enhance the ultaviolet/visible rejection to 102.

Original languageEnglish
Pages (from-to)287-289
Number of pages3
JournalOptical Review
Issue number4
StatePublished - 2003


  • AlN
  • Band-pass filter
  • Diffractive microlens
  • GaN
  • Gray-level mask
  • Solar-blind


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