Fully Solution-Processed Low-Voltage Driven Transparent Oxide Thin Film Transistors

Bo Xuan Yang, Yu Hsin Chang Chien, Ting Chang, Ching Han Liao, Cheng Yi Liu, Anthony Shiaw Tseh Chiang, Cheng Liang Liu

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


In this work, transparent ZnO thin-film transistors (TFTs) are fabricated on ITO glass substrate with only solution processes. The active ZnO channels are deposited by spray pyrolysis. The gate dielectric is a spin-coated high dielectric constant (k) titanium-silicon oxide (TSO) layer, while the source/drain (S/D) electrodes are patterned by two-step spray-printing of silver nanowire (AgNWs)/poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) transparent conductive composite through a shadow mask. The composition and microstructural characteristics of the films, as well as their TFTs performance, are systematically studied as a function of the temperature. The introduction of TSO high k dielectric, with ultraviolet (UV)-assisted post-annealing, significantly improves the device performance and achieves a maximum electron mobility (µmax) value as high as 56.2 cm2 V−1 s−1 when measured with thermally-evaporated Al top electrode. For fully solution-processed transparent TFTs with low temperature fabricated AgNWs/PEDOT:PSS S/D electrodes, the µmax is calculated to be 9.1 cm2 V−1 s−1 operating at a relatively low voltage of <3 V. The TFTs also show hysteresis-free electrical characteristics and optical transparency of ≈80% in the visible region of the optical spectrum.

Original languageEnglish
Article number1800192
JournalPhysica Status Solidi (A) Applications and Materials Science
Issue number24
StatePublished - 19 Dec 2018


  • ZnO
  • high dielectric constant
  • solution-processing
  • thin film transistors
  • transparent


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