Frequency-multiplexed combinatory mass sensing with single data line from multiple integrated film bulk acoustic resonators

S. J. Chen, A. Lin, L. Wang, E. S. Kim

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents a novel array of four film bulk acoustic resonators (FBAR) having four distinct fundamental resonant frequencies that offers parallel and/or combinatory mass sensing of multiple chembio species, such as various proteins. To achieve the multiple resonant frequencies, we connect multiple FBARs (having slightly different resonant frequencies, thus each representing a unique sensor) in parallel, and form one FBAR (out of the multiple) on a chip. This way, when we measure the frequency shifts of the arrayed FBAR through a network analyzer, we have multiple resonant frequencies, each of which will change as a function of added mass (of chembio species), independent of the others.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages783-786
Number of pages4
DOIs
StatePublished - 2011
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • FBAR
  • Film bulk acoustic resonator
  • mass sensing

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