@inproceedings{4ac0b822c2d24776b7a1c1dd6d50e33a,
title = "Frequency-interleaved MEMS ultrasound transducer",
abstract = "This paper presents a sensitive, broad-bandwidth MEMS ultrasound transducer based on frequency interleaving of resonant transducers. Cantilever-like diaphragm transducers with piezoelectric ZnO films have been connected in parallel, so that the sensitivity as a receiver and the sound output as a transmitter are measured to be about 30 times larger than those of a single transducer. The interleaving of the transducers not only increases the sensitivity but also broadens the useable bandwidth greatly.",
keywords = "Array of cantilevers, Frequency-interleaved, MEMS ultrasound transducer, Piezoelectric",
author = "Chen, {Shih Jui} and Youngki Choe and Kim, {Eun Sok}",
year = "2010",
language = "???core.languages.en_GB???",
isbn = "9781439834022",
series = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010",
pages = "312--315",
booktitle = "Nanotechnology 2010",
note = "Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 ; Conference date: 21-06-2010 Through 24-06-2010",
}