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Formation of TiSi2 thin films on stressed (001)Si substrates
S. L. Cheng, H. Y. Huang, Y. C. Peng, L. J. Chen, B. Y. Tsui, C. J. Tsai, S. S. Guo, Y. R. Yang, J. T. Lin
Research output: Contribution to journal › Conference article › peer-review
5
Scopus
citations