Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He; W. W. Wu; Y. L. Chueh; C. L. Hsin; L. J. Chen; L. J. Chou

doi:10.1063/1.2136219

Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

J. H. He, W. W. Wu, Y. L. Chueh, C. L. Hsin, L. J. Chen, L. J. Chou

Department of Electrical Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

Original language	English
Article number	223102
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	22
DOIs	https://doi.org/10.1063/1.2136219
State	Published - 2005

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title = "Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots",

abstract = "The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.",

author = "He, {J. H.} and Wu, {W. W.} and Chueh, {Y. L.} and Hsin, {C. L.} and Chen, {L. J.} and Chou, {L. J.}",

note = "Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.",

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T1 - Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

AU - He, J. H.

AU - Wu, W. W.

AU - Chueh, Y. L.

AU - Hsin, C. L.

AU - Chen, L. J.

AU - Chou, L. J.

N1 - Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2112-M-029-011 and Ministry of Education Grant No. 91-E-FA04-1-4.

PY - 2005

Y1 - 2005

N2 - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

AB - The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4±0.3 and 24.9±4.0 nm, with a density of 4.3× 1010 cm-2. In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings.

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JO - Applied Physics Letters

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Formation and evolution of self-assembled crystalline Si nanorings on (001) Si mediated by Au nanodots

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