Flexible four-in-one micro sensor for reliability and 100-hour durability testing

Chi Yuan Lee, Chia Hung Chen, Chin Lung Hsieh, Kin Fu Lin, Shyong Lee, Ten Lom Chen, Yen Pu Huang

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one (temperature, voltage, current and flow) micro sensor on a flexible substrate. The flexible four-in-one micro sensor use polyimide as the protective layer, owing to its high temperature resistance. This paper will involve designing and fabricating the flexible four-in-one micro sensor. A programmable thermal shock tester and a programmable temperature and humidity tester were used to simulate the inner environment of the low temperature proton exchange membrane fuel cell. The calibration curves reveal repeatability and highly linear of the flexible four-in-one micro sensor. After calibrated and its reliability confirmed, the flexible four-in-one micro sensor will inserted into the low temperature proton exchange membrane fuel cell for local microcosmic measurement.

Original languageEnglish
Pages (from-to)3185-3191
Number of pages7
JournalInternational Journal of Electrochemical Science
Volume10
Issue number4
StatePublished - 2015

Keywords

  • Flexible four-in-one micro sensor
  • MEMS
  • Reliability and durability testing
  • Thermal shock testing and constant temperature and humidity testing

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