FinFET Plus: A scalable FinFET architecture with 3D air-gap and air-spacer toward the 3nm generation and beyond
- C. K. Chiang
- , H. Pai
- , J. L. Lin
- , J. K. Chang
- , M. Y. Lee
- , E. R. Hsieh
- , K. S. Li
- , G. L. Luo
- , Osbert Cheng
- , S. S. Chung
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
16
Scopus
citations