Ferroelectric thin-film integrated capacitor and its application in radio-frequency phase shifter design

Keyphrases

• Radio Frequency 100%
• Phase Shifter 100%
• Ferroelectric Thin Film 100%
• Integrated Capacitor 100%
• Ferroelectric Capacitor 80%
• Bias Voltage 60%
• Measurement Results 40%
• MCM-D 40%
• Fabrication Methods 20%
• Sapphire Substrate 20%
• Insertion Loss 20%
• Return Loss 20%
• Phase Shift 20%
• All-pass Network 20%
• Circuit Topology 20%
• Tunability 20%
• Maximum Phase 20%
• RF Phase Shifter 20%
• Reconfigurable RF Circuits 20%
• Capacitance Density 20%
• Surface Mount Components 20%

Engineering

• Thin Films 100%
• Radio Frequency 100%
• Phase Shifters 100%
• Bias Voltage 50%
• Sapphire Substrate 16%
• Q Factor 16%
• Insertion Loss 16%
• Return Loss 16%
• Electric Network Topology 16%
• System-in-Package 16%
• Phase Shift 16%

Physics

• Thin Films 100%
• Ferroelectric Material 100%
• Q Factor 14%