Ferroelectric thin-film integrated capacitor and its application in radio-frequency phase shifter design

Hsiao Yun Li, Shiu Cheng Chen, Jia Shiang Fu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

Tuning element is essential for the design of tunable and reconfigurable RF circuits. Ferroelectric thin-film integrated capacitor is proposed in this work as the tuning element for MCM-D SiP technology. The proposed ferroelectric capacitors are fabricated on a sapphire substrate. The fabrication process is described. Measurement results show that the capacitance density is about 19 fF/μm2 at 0-V bias. The tunability of the ferroelectric capacitor reaches 2:1 as the bias voltage is increased from 0 V to 7 V. The quality factor at 2.4 GHz is 15.5 under 0-V bias and reaches 30 when the bias voltage is 8 V. The proposed ferroelectric capacitor is applied to a RF phase shifter design for the purpose of demonstrating the potential of using the proposed thin-film ferroelectric technology for realizing MCM-D SiP. All-pass network is adopted as the circuit topology for the phase shifter. The design of the phase shifter is explained. To implement the phase shifter, surface mount components are mounted on the substrate on which the ferroelectric capacitors are fabricated. Measurement results show that, for bias voltage ranging from 0 V to 10 V, the phase shifter exhibits an insertion loss less than 2.6 dB and a return loss greater than 9.5 dB from dc to 6 GHz. Maximum phase shift of 98.8° is achieved at 3.15 GHz.

Original languageEnglish
Title of host publicationEDAPS 2013 - 2013 IEEE Electrical Design of Advanced Packaging Systems Symposium
Pages146-149
Number of pages4
DOIs
StatePublished - 2013
Event2013 6th IEEE Electrical Design of Advanced Packaging Systems Symposium, EDAPS 2013 - Nara, Japan
Duration: 12 Dec 201315 Dec 2013

Publication series

NameEDAPS 2013 - 2013 IEEE Electrical Design of Advanced Packaging Systems Symposium

Conference

Conference2013 6th IEEE Electrical Design of Advanced Packaging Systems Symposium, EDAPS 2013
Country/TerritoryJapan
CityNara
Period12/12/1315/12/13

Keywords

  • phase shifter
  • thin-film ferroelectric capacitors

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