Fabrication study of AIN solar-blind (<280nm) MSM photodetectors grown by low-temperature deposition

Keyphrases

• Photocurrent 100%
• Low Temperature 100%
• Metal-semiconductor-metal Photodetector 100%
• MSM Photodetector 100%
• Low Temperature Deposition 100%
• Solar-blind 100%
• Order of Magnitude 50%
• Dark Current 50%
• Sapphire 50%
• Semiconductors 50%
• Lamp 50%
• Optical Power 50%
• Sputtering System 50%
• Helicon 50%
• Wide Bandgap 50%
• UV Detection 50%
• Epitaxial Thin Film 50%
• III-nitrides 50%
• Deep UV 50%
• MSM Device 50%

Engineering

• Low-Temperature 100%
• Photometer 100%
• Photocurrent 66%
• Thin Films 33%
• Optical Power 33%
• Nitride 33%
• Band Gap 33%

Material Science

• Aluminum Nitride 100%
• Photosensor 100%
• Thin Films 33%
• Lamp 33%
• Optical Power 33%
• Sapphire 33%
• Nitride Compound 33%