Fabrication of various curved relief structures through concave surface forming and soft replica molding

Teng Kai Shih, Chia Fu Chen, Jeng Rong Ho, Fang Tzu Chuang

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

In this case, our groups presented various optical structures through the presented method, involving concave surface forming and soft replica molding. The method of concave surface forming is mainly for the fabrication of concave surface. The method of soft replica molding is mainly for the fabrication of replica. Concave and convex relief structures, including circular curved relief structures, convex relief structures with platform structures on the top, refractive beam-shaping elements, these structures with dual curvatures and asymmetric structures, can be easily made through the presented method, respectively. All processes of manufacture are in several simple steps without multistep optical lithography and complex masks.

Original languageEnglish
Pages (from-to)471-475
Number of pages5
JournalMicroelectronic Engineering
Volume83
Issue number3
DOIs
StatePublished - Mar 2006

Keywords

  • Concave surface forming
  • Curved relief structures
  • Soft replica molding

Fingerprint

Dive into the research topics of 'Fabrication of various curved relief structures through concave surface forming and soft replica molding'. Together they form a unique fingerprint.

Cite this