@inproceedings{75c0902301814ffca741588b80312ac0,
title = "Fabrication of sputtering-GaN waveguide resonators",
abstract = "We demonstrate sputtering-GaN resonators on the silicon-based substrate. By employing high-power impulse magnetron sputtering, waveguide resonators with quality factor 4×104 can be achieved. This work highlights the potentials for fabricating GaN waveguides using CMOS-compatible processes.",
author = "Wu, {Shih Hsin} and Liu, {Hung Sheng} and Chen, {Zhi Guang} and Chen, {Sheng Hui} and P.-H. Wang",
note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023, {\textcopyright} 2023 The Author(s); Frontiers in Optics + Laser Science 2023, FiO, LS 203: Part of Frontiers in Optics + Laser Science 2023 ; Conference date: 09-10-2023 Through 12-10-2023",
year = "2023",
doi = "10.1364/FIO.2023.JW4A.18",
language = "???core.languages.en_GB???",
series = "Frontiers in Optics: Proceedings Frontiers in Optics + Laser Science 2023, FiO, LS 2023",
publisher = "Optical Society of America",
booktitle = "Frontiers in Optics",
}