Fabrication of single crystalline SiC layer on high temperature glass

Keyphrases

• High Temperature 100%
• Single-crystalline 100%
• Anodic Bonding 100%
• SiC Layer 100%
• Activation Energy 50%
• Layer Transfer 50%
• Process Window 50%
• Microcracks 50%
• Transfer Approach 50%
• Layer Splitting 50%
• Surface Blistering 50%
• Direct Bonding 50%
• SiC Wafer 50%
• Formation Energy 50%
• 6H-SiC 50%

Material Science

• Surface (Surface Science) 100%
• Activation Energy 50%